| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate with recesses capable of uniformizing the shape of the recesses to be formed. <P>SOLUTION: The method for manufacturing a substrate with a plurality of recesses includes: a mask layer forming step S2 for forming a mask layer with a plurality of openings on a substrate; etching steps S3 and S6 for etching the substrate via the openings to form the recesses; cleaning steps S4 and S7 for cleaning the recesses with acidic solution; and a mask layer removal step S8 for removing the mask layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
