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发明名称
Thin film solar cell manufacturing equipment
摘要
<p>박막 태양 전지 제조 장치는, 감압으로 배기되고, CVD법에 의해 기판에 막을 형성하는 성막실; 상기 성막실과 제1 개폐부를 개재하여 연접되고, 대기압과 감압을 절환 가능한 삽입·취출실; 성막 처리 전의 기판을 보유지지하는 제1 캐리어; 성막 처리 후의 기판을 보유지지하는 제2 캐리어;를 구비하고, 상기 삽입·취출실은 상기 제1 캐리어와 상기 제2 캐리어를 동시에 수용한다.</p>
申请公布号
KR101210533(B1)
申请公布日期
2012.12.10
申请号
KR20107022490
申请日期
2009.06.03
申请人
发明人
分类号
H01L21/205;H01L31/042;H01L31/18
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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