| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position correction method for a push-up pin in which, by recognizing a positional relation between a dicing lane or a die and a push-up trace by image processing, the deviation amount between the center of the push-up pin and the center of the die is calculated, and the push-up pin is positionally corrected. <P>SOLUTION: At least one of a dicing lane 44 and a die component P, and a pick-up trace 48 formed on a pressure sensitive adhesive sheet 43 by pushing-up by a push-pin 45 are imaged by an imaging device 25 and the image thereof is processed. The deviation amount between the center of the push-up pin and the center of the die component P is calculated by recognizing a positional relation between one of a dicing lane and a die, and the pick-up trace by image processing. On the basis of the deviation amount, a pushing-up position of the push-up pin to the die component is corrected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
