发明名称 METHOD FOR MANUFACTURING LIGHT-ABSORPTION LAYER OF SOLAR CELL THROUGH SELENIZATION PROCESS UNDER ELEMENTAL SELENIUM VAPOR ATMOSPHERE AND THERMAL PROCESSING APPARATUS FOR MANUFACTURING LIGHT-ABSORBING LAYER
摘要 <p>The present invention relates to a method for manufacturing a light-absorption layer of a solar cell. The method for manufacturing the light-absorption layer forms the light-absorption layer by thermal process of a specimen having a thin film containing one or two, or more, elements among copper, indium and gallium, with elemental selenium on a substrate, and comprises the steps of: (a) heating an entire portion of a wall of a sealed chamber to the predetermined temperature for forming the thin film to maintain the vapor pressure of a selenium gas and in order not to condense the selenium on the entire portion of the chamber; (b) setting the specimen and the elemental selenium on a susceptor at room temperature and inserting the susceptor into the chamber; and (c) heating the specimen at a lower part of the susceptor and simultaneously heating the elemental selenium at an upper part of the susceptor, wherein the (c) step is characterized in that the selenium vapor pressure of the internal space of the chamber, due to the vaporization of the elemental selenium, does not always exceed the vapor pressure corresponding to the temperature of the specimen by controlling the temperature of the elemental selenium set inside the chamber and the temperature of the specimen so as not to condense the liquefied selenium on the specimen which is set at room temperature and is not yet heated.</p>
申请公布号 WO2012165710(A1) 申请公布日期 2012.12.06
申请号 WO2011KR05727 申请日期 2011.08.04
申请人 SEMICS INC.;SONG, SEONG HOON 发明人 SONG, SEONG HOON
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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