| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a more reliable dynamic quantity sensor. <P>SOLUTION: A dynamic quantity sensor comprises: an anchor and a fixed electrode fixed on a substrate; a movable electrode arranged between the anchor and the fixed electrode in a location distanced from the substrate and configured to be electrically connected with the fixed electrode when making contact with the fixed electrode; and a beam provided in a location distanced from the substrate, including a plurality of straight beam portions, and having one end connected to the anchor and the other end connected to the movable electrode. The anchor, the fixed electrode, the movable electrode and the beam are made of silicon single crystal whose principal surface is in a crystal plain direction having anisotropy in shearing modulus. The longitudinal direction of the plurality of straight beam portions is different from a direction where minimum shearing modulus can be obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
