ALIGNMENT DEVICE, AND ALIGNMENT METHOD

摘要

The present invention inhibits the deformation of an object to be aligned and aligns the object to be aligned with high precision at a light load. This alignment device (100) is provided with a spin chuck (110) and a supporting part (130). The spin chuck (110) sticks to and rotates an object (10) to be aligned. The supporting part (130) sprays inactive gas at a position which is different from the position at which the spin chuck (110) sticks to the object (10) to be aligned, and supports the rotating object (10) to be aligned by means of the inactive gas being sprayed.