| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide means which allows an operator for easily acquiring a desired observation image under an arbitrary observation condition, in a scanning electron microscope having a plurality of different types of detectors. <P>SOLUTION: An image is displayed in real time while changing an arbitrary observation condition continuously, and an operator can acquire an image easily by selecting an image that the operator feels best among the images displayed in real time. The observation condition includes the working distance, vacuum, addition/subtraction of the detection signals from a reflection electron detection element divided into a plurality, the voltage being applied to the bias electrode of a low vacuum secondary electron detector, and the mixing ratio of signals when displaying a mixing image. <P>COPYRIGHT: (C)2013,JPO&INPIT |
