发明名称 |
LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE |
摘要 |
It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
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申请公布号 |
US2012305766(A1) |
申请公布日期 |
2012.12.06 |
申请号 |
US201213489522 |
申请日期 |
2012.06.06 |
申请人 |
TANAKA HIDEKI;KOYAMA MASAHIRO;MIZUOCHI MASAKI;TSUJI HIROSHI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
TANAKA HIDEKI;KOYAMA MASAHIRO;MIZUOCHI MASAKI;TSUJI HIROSHI |
分类号 |
H02K41/03;H01J37/20;H01J37/26 |
主分类号 |
H02K41/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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