CERAMIC HEATER HAVING STRAP FOR GROUND

摘要

PURPOSE: A ceramic heater having a grounding strap is provided to be mounted on a path on a lower part of a shaft to be suitable for the front side shape of a strap by having a rectangular shape of a predetermined width on the front side. CONSTITUTION: A heater plate(20) applies heat to a substrate. The heater plate has an RF electrode for generating plasma. A shaft(10) is mounted on the bottom surface of the heater plate. Inside the shaft an RF load(32) is stored to penetrate upwardly and downwardly. The shaft is electrically connected with the RF load.