| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable filter having excellent optical characteristics without causing increase in driving voltage. <P>SOLUTION: A second substrate 3 has two surfaces which have different positions in a thickness direction of the substrate at a side of a movable part 21. A driving electrode 33 is provided on one of the two surfaces, and a detecting electrode 40 is provided on the other of the two surfaces. Electrostatic attraction is generated between the driving electrode 33 and the movable part 21 by generating potential difference therebetween on the basis of capacitance between the detecting electrode 40 and the movable part 21, thereby displacing the movable part 21. Light reflection is repeated between a fixed reflection film 35 and a movable reflection film 25 to produce interference, then light having wavelength corresponding to distance between the fixed reflection film 35 and the movable reflection film 25 is emitted to the outside. <P>COPYRIGHT: (C)2013,JPO&INPIT |
