| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate loading apparatus which can prevent displacement of a substrate due to air entrainment. <P>SOLUTION: A substrate loading apparatus 100 loading a substrate 10 comprises a stage 30 holding the substrate 10 and a vacuum chuck 31 absorbing the substrate 10. The vacuum chuck 31 includes suction holes 32 arranged on a surface 30s of the stage 30 and the vacuum chuck 31 sucks the substrate 10 from one end 30a toward another end 30b of the stage 30. <P>COPYRIGHT: (C)2013,JPO&INPIT |
