发明名称 EXPOSURE DEVICE
摘要 <p>This exposure device is provided with a light modulation element array in which a plurality of light modulation elements are arranged two-dimensionally, and a projection optical system that causes the light reflected by the light modulation element array to form an image on an exposure surface of an object of rendering. The projection optical system comprises the following: a first optical system that causes pattern image light reflected by the light modulation element array to form an image on a first image-forming surface; an image- dividing optical system that divides at the first image forming surface the pattern image formed on the first image forming surface, and forms a plurality of divided pattern images; and a second optical system that causes the light of the plurality of divided pattern images to form an image on the exposure surface.</p>
申请公布号 WO2012165205(A1) 申请公布日期 2012.12.06
申请号 WO2012JP62978 申请日期 2012.05.22
申请人 ORC MANUFACTURING CO., LTD.;OKUYAMA TAKASHI 发明人 OKUYAMA TAKASHI
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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