发明名称 RESIN COMPOSITION AND SEMICONDUCTOR ELEMENT SUBSTRATE
摘要 <p>Provided is a resin composition comprising a binder resin (A), a radiation-sensitive compound (B), a silane-modified resin (C) and an antioxidant (D), the resin composition characterized in that the content of the silane-modified resin (C) is 0.1 to 150 parts by weight per 100 parts by weight of the binder resin (A); the content of the antioxidant (D) is 0.1 to 10 parts by weight per 100 parts by weight of the binder resin (A); and when a resin film having a thickness of 2 to 3 µm is molded using the resin composition and the molded resin film is baked at 230ºC, the amount of curvature is 14 µm or less.</p>
申请公布号 WO2012165448(A1) 申请公布日期 2012.12.06
申请号 WO2012JP63839 申请日期 2012.05.30
申请人 ZEON CORPORATION;OSAKU, YUMI 发明人 OSAKU, YUMI
分类号 G03F7/075;G03F7/004;G03F7/023;G03F7/032 主分类号 G03F7/075
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