摘要 |
<p>A ferroelectric film is produced from perovskite crystals. The crystalline orientation is a <100> main orientation, and rhombohedral crystals and tetragonal crystals are mixed. In the tetragonal crystals, an a-axis orientation and a c-axis orientation are mixed. When a function (F) indicating a <100> peak by the 2?/? measurement of X-ray diffraction is divided into functions (F1, F2, F3) indicating the diffraction intensities of X rays incident on the tetragonal crystals in the a-axis orientation, the tetragonal crystals in the c-axis orientation, and the rhombohedral crystals, respectively, the ratio of the integral value of the function (F3) corresponding to the rhombohedral crystals to the total of the integral values of the three functions (F1, F2, F3) is 0.2-0.8 inclusive.</p> |