| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cryopump for high speed exhaustion of a non-condensable gas such as hydrogen, and to provide a method for manufacturing such the cryopump. <P>SOLUTION: The cryopump 10 includes an array 14 of a plurality of cryosorption panels 50 enveloped by a cryopump internal open space 30 opened to a cryopump opening 31, and a radiation shield 16 for enveloping the cryopump internal open space 30. At least one of the plurality of cryosorption panels 50 has its panel front surface divided into an adsorption area 76 for a non-condensable gas and a condensation area 82 for a condensable gas. <P>COPYRIGHT: (C)2013,JPO&INPIT |
