Multi-channel detection device for detecting field components of magnetic field vector produced by magnetic field line camera, has sensor chips whose respective associated Hall-sensors form separate measuring channel

摘要

The device has sensor chips (10,20) formed in silicon substrate (1). The chips have equal number of Hall sensors (11,12,21,22) on active surface along a line specific interval. The sensor chips on the carrier are arranged, such that Hall sensors of sensor chips are aligned orthogonally to each other. The respective associated Hall-sensors of sensor chips form a separate measuring channel.