| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid actuator capable of performing drive with a low voltage and flowing the fluid in a narrow fluid channel in one direction. <P>SOLUTION: A fluid actuator includes a piezoelectric body 31, a fluid channel 2 having the piezoelectric body 31 on a part of the inner wall and enabling a fluid to move inside, and an elastic surface wave generation unit 101 for driving the fluid in the fluid channel by an elastic surface wave generated from a comb-shaped electrode formed on the surface of the piezoelectric body 31 facing the fluid channel 2. The elastic surface wave generation unit 101 is arranged at the position offset from the center position of C, D along any one of transmitting directions of the elastic surface wave when two points where a line extended along both transmitting direction of the elastic surface wave generated from the elastic surface wave generation unit 101 collides with the wall surface of the fluid channel or an outlet opening and an inlet opening of the fluid channel are C, D. <P>COPYRIGHT: (C)2013,JPO&INPIT |
