发明名称 |
NANO PIEZOELECTRIC DEVICE HAVING A NANOWIRE AND METHOD OF FORMING THE SAME |
摘要 |
Provided are a nano piezoelectric device and a method of forming the nano piezoelectric device. The nano piezoelectric device includes a lower electrode, a nanowire extending upward from the lower electrode, and an upper electrode on the nanowire. The nanowire includes a conductive wire core and a wire shell surrounding the wire core and including a piezoelectric material.
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申请公布号 |
US2012306319(A1) |
申请公布日期 |
2012.12.06 |
申请号 |
US201213563773 |
申请日期 |
2012.08.01 |
申请人 |
PARK JONG-HYURK;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PARK JONG-HYURK |
分类号 |
H02N2/18;B82Y15/00;H01L41/22 |
主分类号 |
H02N2/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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