DMOS TRANSISTOR HAVING AN INCREASED BREAKDOWN VOLTAGE AND METHOD FOR PRODUCTION

摘要

A depletion type DMOS transistor comprises a gap in electrode material allowing incorporation of a well dopant species into the underlying semiconductor material. During subsequent dopant diffusion a continuous well region is obtained having an extended lateral extension without having an increased depth. The source dopant species is implanted after masking the gap. Additional channel implantation is performed prior to forming the gate dielectric material.