ALIGNMENT DEVICE, AND ALIGNMENT METHOD

摘要

The present invention inhibits the deformation of an object to be aligned and aligns the object to be aligned with high precision at a light load. This alignment device (100) is provided with a spin chuck (110) and a supporting member (130). The spin chuck (110) sticks to and rotates an object (10) to be aligned. The supporting member (130) supports the rotating object (10) to be aligned at a position that is different from the position at which the spin chuck (110) sticks to the object (10) to be aligned. Moreover, the supporting body (130) is configured so as to rotate in synchronization with the object (10) to be aligned.