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经营范围
发明名称
Evaporation equipment including deposits vessel
摘要
<p>또한 본 발명은, 피증착 기판의 저면에 결합되어 구동수단의 상측에 위치되는 마스크와, 마스크를 피증착 기판의 저면에 고정시키는 고정클립을 더 포함하여, 피증착 기판에 형성된 증착막의 손상을 방지할 수 있는 증착장치를 제공한다.</p>
申请公布号
KR101208995(B1)
申请公布日期
2012.12.06
申请号
KR20050032569
申请日期
2005.04.20
申请人
发明人
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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