| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method capable of forming an optical waveguide with an optical path conversion function directly on a substrate by a simple process, the optical waveguide allowing fine processing and having high surface accuracy, and to provide the optical waveguide manufactured by the manufacturing method. <P>SOLUTION: In a method for manufacturing an optical waveguide whose clad part is formed of a positive photosensitive resin, an inclined surface which is formed by film loss in a process of developing the positive photosensitive resin is set to an optical path conversion mirror surface. Preferably, a polysiloxane-based positive photosensitive resin is used as the positive photosensitive resin, and a core part surrounded by the clad part is formed of a negative photosensitive resin. <P>COPYRIGHT: (C)2013,JPO&INPIT |
