| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device that can enlarge an inspection target region and ensure to hold an object. <P>SOLUTION: In an X-ray inspection device, a clamp 50 supports a substrate 10 from upward. An end surface of the clamp 50 is slanted. Accordingly, the substrate 10 is ensured to be supported by the clamp 50, while beam transmitted through the substrate 10 from an X-ray (shown by a symbol XR) radiated from an X-ray source 2 can be prevented from being covered by the clamp 50 as possible. <P>COPYRIGHT: (C)2013,JPO&INPIT |
