发明名称 EXPOSURE APPARATUS FOR PHOTOALIGNMENT PROCESS AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY
摘要 An exposure apparatus for a photoalignment process includes; a first photomask including a plurality of transmission parts; and a second photomask including a plurality of transmission parts, where the first photomask and the second photomask partially overlap each other such that each of the first photomask and the second photomask includes an overlapping region and a non-overlapping region, the overlapping region of at least one of the first photomask and the overlapping region of the second photomask includes at least two subregions, and shapes or arrangements of the transmission parts in the at least two subregions are different from each other.
申请公布号 US2012308936(A1) 申请公布日期 2012.12.06
申请号 US201113241376 申请日期 2011.09.23
申请人 CHO SOO-RYUN;LEE JUN WOO;KIM KYOUNG TAE;YEOM JOO SEOK;KANG SUK HOON;KIM EUN JU;SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO SOO-RYUN;LEE JUN WOO;KIM KYOUNG TAE;YEOM JOO SEOK;KANG SUK HOON;KIM EUN JU
分类号 G03F7/20;G03B27/42 主分类号 G03F7/20
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