CaF2 POLYCRYSTALLINE BODY, FOCUS RING, PLASMA TREATMENT APPARATUS, AND METHOD FOR PRODUCING CaF2 POLYCRYSTALLINE BODY

摘要

A polycrystalline body comprising CaF2, the CaF2 polycrystalline body having an average crystal particle diameter of 200 µm or greater; and a method for producing a CaF2 polycrystalline body, wherein the method for producing a CaF2 polycrystalline body comprises a step for introducing a molded article obtained using a pulverulent CaF2 raw material into a vacuum sintering furnace, performing sintering for 6 hours or more at a temperature of 1400oC or less, and obtaining a CaF2 polycrystalline body.