发明名称 |
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME |
摘要 |
<p>A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a wafer (1100); a plurality of convex structures (1200) formed on the wafer (1100), in which every two adjacent convex structures (1200) are separated by a cavity in a predetermined pattern and arranged in an array, and the cavity between every two adjacent convex structures is less than 50nm in width; and a first semiconductor film (1300) formed on the plurality of convex structures (1200), in which a part of the first semiconductor film (1300) is spaced apart from the wafer (1100).</p> |
申请公布号 |
WO2012163046(A1) |
申请公布日期 |
2012.12.06 |
申请号 |
WO2011CN82109 |
申请日期 |
2011.11.11 |
申请人 |
TSINGHUA UNIVERSITY;WANG, JING;GUO, LEI |
发明人 |
WANG, JING;GUO, LEI |
分类号 |
H01L29/06;H01L21/02;H01L21/336 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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