发明名称 SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
摘要 <p>A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a wafer (1100); a plurality of convex structures (1200) formed on the wafer (1100), in which every two adjacent convex structures (1200) are separated by a cavity in a predetermined pattern and arranged in an array, and the cavity between every two adjacent convex structures is less than 50nm in width; and a first semiconductor film (1300) formed on the plurality of convex structures (1200), in which a part of the first semiconductor film (1300) is spaced apart from the wafer (1100).</p>
申请公布号 WO2012163046(A1) 申请公布日期 2012.12.06
申请号 WO2011CN82109 申请日期 2011.11.11
申请人 TSINGHUA UNIVERSITY;WANG, JING;GUO, LEI 发明人 WANG, JING;GUO, LEI
分类号 H01L29/06;H01L21/02;H01L21/336 主分类号 H01L29/06
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