| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dynamic behavior analysis system capable of simply analyzing dynamic behavior of a microscopic region of a sample to be analyzed such as a material or a structure even if the dynamic behavior is accompanied with a macroscopic motion of the sample to be analyzed, and to provide a dynamic behavior analysis method. <P>SOLUTION: A dynamic behavior analysis system comprises: a sample 60 which consists of a surface label grating film and a sample to be analyzed, the surface label grating film at least covering an analysis surface of a sample to be analyzed, freely deformable, having a periodic structure formed at least on the surface layer on the side of the sample to be analyzed; irradiation means 20 for making probe light which is spot light enter; light-receiving means 30 for detecting diffraction light from the surface label grating film; distance detection means 70 for detecting a distance between the sample to be analyzed and the light-receiving means; storage means 14 for holding diffraction angle data; and analysis means 13 for calculating change in the periodic structure of a diffraction grating from the diffraction angle data held in the storage means 14 and analyzing dynamic behavior of the sample to be analyzed from the change in the periodic structure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
