| 摘要 |
[Problem] To provide a three-dimensional measuring apparatus which has improved measuring accuracy and the like, while suppressing deterioration of measuring efficiency, at the time of performing three-dimensional measurement. [Solution] A substrate inspecting apparatus (10) is provided with: a conveyer (13), which transfers a printed substrate (1); an illuminating apparatus (14), which radiates predetermined light to a surface of the printed substrate (1) from diagonally above; and a camera (15), which picks up an image of the printed substrate (1) irradiated with the light. The illuminating apparatus (14) is provided with a first light (14A) to an eighth light (14H). During a time when image pickup is performed a plurality of times under pattern light at first luminance for the purpose of three-dimensional measurement, image pickup is performed a plurality of times under pattern light at second luminance for the purpose of the three-dimensional measurement, and image pickup under uniform light of each of color components at the first luminance and the second luminance is performed for the purpose of obtaining luminance image data. |
