METHOD FOR MAKING PATTERNS ON THE SURFACE OF A SUBSTRATE USING BLOCK COPOLYMERS

摘要

The invention relates to a method for making patterns on the surface of a substrate by graphoepitaxy, comprising the following steps: a step of depositing a layer of resin on the surface of the substrate; a step of making patterns in the resin on the surface of a substrate; a step of curing the patterns in the resin by producing a layer of amorphous carbon on the surface of the patterns in the resin; a step of depositing a layer of statistical copolymer after the step of curing the patterns in the resin; a step of grafting the layer of statistical copolymer onto the patterns in the resin by annealing; and a step of depositing a layer of a block copolymer into the spaces defined by the patterns in the resin after the step of curing the patterns and the grafting of the layer of statistical copolymer.