SUBSTRATE-PROCESSING ASSISTANCE DEVICE

摘要

The present invention improves the practical utility of an assistance device for assisting substrate processing with respect to decreased work-result quality. On the basis of inspection data from inspection devices (26, 34, 30), said assistance device (10) computes the following quality indices that indicate the quality of the substrate processing: (a) processing-device quality indices that are quality indices for substrate-processing devices (24, 30, 38) themselves; and (b) location-group quality indices that are quality indices for location groups that each comprise one or more work locations. The assistance device has a display device (49) display said quality indices. An operator can refer to said two types of quality indices to understand quality decreases related to the substrate-processing devices and easily understand the factors behind such decreases.