| 摘要 |
A multi-axis actuating apparatus for a nano-positioning apparatus includes a movable element attached to a sample platform, a plurality of driving elements, and a plurality of actuators. The driving elements frictionally engage the movable element and are configured to selectively move the movable element along a first direction. The plurality of actuators move the plurality of driving elements when driving signals are applied to the plurality of actuators. Different driving signals may be applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements in different directions along the plurality of driving elements. The movable element is titled due to the different displacements.
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