OBJECT REPLACING SYSTEM, EXPOSURE DEVICE, MANUFACTURING METHOD OF FLAT PANEL DISPLAY, MANUFACTURING METHOD OF DEVICE, AND OBJECT REPLACING METHOD

摘要

PROBLEM TO BE SOLVED: To replace a substrate on a substrate stage quickly.

SOLUTION: A substrate stage 20a floats a substrate P1by jetting pressurized gas from a substrate holder 30a, and a substrate carrying-out device 93 carries out the substrate P1from the substrate holder 30a by moving the substrate P1along a horizontal plane by using the top face (substrate mounting surface) of the substrate holder 30a as a guide surface. Another substrate P2to be exposed next is waiting above the substrate holder 30a when the substrate P1is carried out, and delivered to substrate lift devices 46a of the substrate stage 20a upon finishing the carrying-out operation of the substrate P1.

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