OBJECT CARRY-OUT METHOD, OBJECT EXCHANGE METHOD, OBJECT HOLDING APPARATUS, EXPOSURE APPARATUS, MANUFACTURING METHOD FOR FLAT PANEL DISPLAY, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To exchange a substrate on a substrate stage quickly.

SOLUTION: A substrate holder 30a is provided with an X groove 31x housing a substrate tray 40a used for carrying a substrate P. Inside the X groove 31x is provided a substrate carry-out device 70a that moves the substrate P together with the substrate tray 40a by pressing the substrate tray 40a. Therefore, the carry-out operation of the substrate can be started after the exposure process on the substrate P ends and before the substrate stage 20a is positioned at a substrate exchange position for the exchange of the substrate P.

COPYRIGHT: (C)2013,JPO&INPIT