发明名称 ARRANGEMENT FOR GENERATING A DIFFERENTIAL INTERFERENCE CONTRAST IMAGE
摘要 An arrangement for generating a differential interference contrast image (DIC) of an object in an image plane, comprising a radiation source; a Köhler illumination optical unit for illuminating the object with light from the radiation source; an objective for imaging the object plane into an image plane, wherein the objective has an exit pupil and an entrance pupil and wherein the entrance pupil of the objective lies in the illumination pupil of the Köhler illumination optical unit; and a component for generating interference or optical filtering, is characterized in that the component for generating interference or optical filtering is arranged in the exit pupil of the objective, and the component for generating interference or optical filtering is formed by an amplitude filter having an amplitude transmission factor FDIC(x,y) which at least approximately satisfies the formula (I) wherein FDIC(x,y) is a functional expression for describing the amplitude filter transmission and the phase of the amplitude filter as a function of the coordinates x and y.
申请公布号 WO2012163566(A1) 申请公布日期 2012.12.06
申请号 WO2012EP55532 申请日期 2012.03.28
申请人 HSEB DRESDEN GMBH;SCHMIDT, CHRISTINE 发明人 SCHMIDT, CHRISTINE
分类号 G02B21/14 主分类号 G02B21/14
代理机构 代理人
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