APPARATUS AND METHOD FOR PRODUCING ORIENTED CARBON NANOTUBE AGGREGATE

摘要

An apparatus for producing oriented carbon nanotube (CNT) aggregates, which is provided with: a growth unit (3) that comprises a growth furnace (3a) for growing oriented CNT aggregates by heating a catalyst and/or a starting material gas, while having the ambient environment of the catalyst to be a starting material gas environment; and a conveyance unit (6) for conveying a substrate (10) for the production of oriented CNT aggregates from the inside to the outside of the growth furnace (3a). The apparatus for producing oriented CNT aggregates is also provided with a heating unit (13c) for heating the carry-out port, through which the substrate (10) for the production of oriented CNT aggregates is taken out from the growth furnace (3a), from the outside of the growth furnace (3a).