| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card capable of performing respectively different tests for a plurality of chips by a simple configuration. <P>SOLUTION: The probe card includes: a first test part 21 to which first transmission lines 17 for transmitting test signals for executing a first test from a plurality of channels 11 to 14 are approximately aggregated to execute the first test for chips 3a of a semiconductor wafer 3; and a second test part 22 to which second transmission lines 18 for transmitting test signals for executing a second test from the plurality of channels 11 to 14 are approximately aggregated to execute the second test for the chips 3a of the semiconductor wafer 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
