| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer inductor in which the reliability characteristics, e.g. high temperature load, moisture resistance, are enhanced while enhancing the permeability and the insulation resistance. <P>SOLUTION: The multilayer inductor comprises: a laminate consisting of a plurality of magnetic material layers; and a coil conductor formed spirally in the laminate. The coil conductor has a conductor pattern formed on the magnetic material layer, and a via hole conductor penetrating the magnetic material layer and connecting the plurality of magnetic material layers electrically. The magnetic material layer includes multiple metallic particles composed of an Fe-Si-M based soft magnetic alloy, and an oxide film composed of an oxide of a soft magnetic alloy formed on the surface of the metallic particles. Furthermore, a coupling part via an oxide film formed on the adjoining metallic particle surfaces, and a coupling part of the metallic particles in a part where the oxide film does not exist are provided. A layer composed of a magnetic material filled with a resin material is formed at least partially in a cavity produced by integration of the metallic particles. <P>COPYRIGHT: (C)2013,JPO&INPIT |
