MICROHEATER-BASED IN SITU SELF-CLEANING DYNAMIC STENCIL LITHOGRAPHY
摘要
The invention concerns a method and a device wherein a stencil is provided with an integrated microhotplate on the stencil membrane to prevent aperture clogging, whereby the stencil can be locally heated up in order to minimize material condensation, remove clogging and control the resolution of the deposited material by deforming the membrane towards or away from a substrate.
申请公布号
WO2012164546(A2)
申请公布日期
2012.12.06
申请号
WO2012IB52806
申请日期
2012.06.04
申请人
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL);XIE, SHENQI;SAVU, ANDREEA VERONICA;BRUGGER, JUERGEN