| 摘要 |
A MEMS substrate is formed from a transparent substrate and a movable type shutter arranged on each pixel of a surface of the transparent substrate. An AP substrate includes another substrate and a light blocking film arranged on the other transparent substrate formed with an aperture corresponding to each shutter. A plurality of supporting columns is formed on a surface of the transparent substrate of the MEMS substrate. A plurality of cylindrical contact holes having the same inner diameter as an outer diameter of each supporting column are formed at a position corresponding to one part of the supporting columns. Both substrates are arranged with a certain interval so that each shutter and an aperture oppose each other, thereby a tip end of corresponding supporting columns is inserted into each contact hole and in this way, both substrate are mutually positioned. |
