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发明名称
摘要
申请公布号
JP5087815(B2)
申请公布日期
2012.12.05
申请号
JP20040312135
申请日期
2004.10.27
申请人
发明人
分类号
H01L51/50;C07D519/00;C09K11/06;C23C14/12;C23C14/24
主分类号
H01L51/50
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代理人
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