| 摘要 |
PURPOSE: A rare earth oxide-alumina based ceramic with plasma resistance and excellent mechanical strength and a manufacturing method thereof are provided to obtain a ceramic which has phase stability and an excellent plasma-proof property. CONSTITUTION: A rare earth oxide-alumina based ceramics with plasma resistance is rare earth oxide-alumina based ceramic with a composition of A3Al5O12. A site is composed of GdxY1-x(0<x<=0.8). The rare earth oxide-alumina based ceramic includes garnet crystal. The garnet crystal is comprised of a solid solution having a substituted structure in which Gd and Y are atomically substituted. In the rare earth oxide-alumina based ceramic, The corundum crystal amount is 10% smaller than the total crystal amount in a relative amount of garnet crystalline, GdAlO3 crystalline and corundum crystal is measured by garnet structure diffraction peak intensity I, GdAlO3 structure diffraction peak intensity I, and corundum structure diffraction peak intensity I. [Reference numerals] (AA) Strength Au
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