| 摘要 |
PURPOSE: A complex nitride coating film with excellent hardness and abrasion resistance and a manufacturing method thereof are provided to improve the hardness and abrasion resistance of a mechanical part by forming the complex nitride coating film with a three-dimensional microstructure on the surface of the mechanical part. CONSTITUTION: A method for manufacturing a complex nitride coating film comprises the steps of: forming a base-metal coating film by depositing base metal or non-transitive metal on the surface of a base material(110,210) mounted in a deposition chamber by asymmetric magnetron sputtering and injecting transitive metal into the grain boundary of the base-metal coating film by DC sputtering or arc ion plating to form a complex nitride coating film, wherein the base material is a metal or ceramic material and the base metal or non-transitive metal belongs to IIIA-VIA groups.
|
