| 摘要 |
The invention provides a decompressing and drying device, which reduces the occupied area as a whole device and has a little heat influence on a substrate of non-heating at the same time of rapidly decompressing and drying. The decompressing and drying device (1) includes the function to decompress inside of a chamber (10) and a heating part (30) for heating the substrate (9) in the chamber (10).Therefore, the decompressing and drying device (1) is bale to heat the substrate (9) without carrying the substrate after decompressing and drying the substrate (9). Hence, the device can rapidly decompress and dry. In addition, since the heating process is in no need of other devices, the occupied area as a whole device can be reduced. Furthermore, the heating part heats the substrate (9) from updirection, so there is a little possibility that remaining heat at the time of non-heating influences on the substrate (9). |
