| 摘要 |
<p>The device (1) has an optoelectronic detector (4) arranged opposite to point-shaped, divergent light sources (3) e.g. LEDs, and a manipulation unit (7) holding and/or moving a flat object (2) e.g. wafer. The light sources include a fan-shaped radiation pattern, and are arranged along a straight line, where the light sources are arranged along a straight line. The manipulation unit is connected with a controlling unit and rotatably mounted and/or moved parallel or perpendicular to a measurement plane (8). The manipulation unit is positioned between detector and light sources. An independent claim is also included for a method for optically measuring a dimension of an object.</p> |
