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发明名称
摘要
申请公布号	JP5090341(B2)	申请公布日期	2012.12.05
申请号	JP20080508715	申请日期	2007.04.04
申请人		发明人
分类号	C23C16/448;H01L21/205;H01L21/31	主分类号	C23C16/448
代理机构		代理人
主权项
地址

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