| 摘要 |
PURPOSE: A semiconductor carrier cleaning system is provided to improve cleaning efficiency by automatically cleaning a body and a cover of an FOUP(Front Opening Unified Pod). CONSTITUTION: A carrier body cleaning unit(100) cleans a semiconductor carrier body. A carrier cover cleaning unit(200) cleans the semiconductor carrier cover. A semiconductor carrier loading unit(300) includes a carrier receiving stage and a cover opening module. A transfer unit(400) transfers the carrier body and the carrier cover. The transfer unit includes a body transfer robot(410), a cover transfer robot(420), and a path providing unit(430).
|
