| 摘要 |
PURPOSE: A substrate cleaning method and a roll cleaning member are provided to effectively clean the surface of a substrate with high cleanliness by optimizing the shape of the roll cleaning member. CONSTITUTION: A spindle(10) supports a peripheral part of a substrate(W) and horizontally rotates the substrate. A top roll holder(12) is placed which can ascend and descend to the upper direction of the substrate. A bottom roll holder(14) is placed which can ascend and descend to a lower direction of the substrate. A top cleaning liquid supply nozzle(20) supplies cleaning liquid to the upper side of the substrate by being placed on the upper direction of the substrate. A bottom cleaning liquid supply nozzle(22) supplies cleaning liquid to the lower side of the substrate by being placed on the lower direction of the substrate.
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