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发明名称
摘要
申请公布号
JP5092340(B2)
申请公布日期
2012.12.05
申请号
JP20060278448
申请日期
2006.10.12
申请人
发明人
分类号
H01L21/336;H01L21/8234;H01L27/088;H01L29/78
主分类号
H01L21/336
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