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发明名称
摘要
申请公布号	JP5087818(B2)	申请公布日期	2012.12.05
申请号	JP20050088909	申请日期	2005.03.25
申请人		发明人
分类号	H01L21/338;H01L29/778;H01L29/812	主分类号	H01L21/338
代理机构		代理人
主权项
地址

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