| 摘要 |
PURPOSE: A semiconductor carrier cleaning device is provided to efficiently clean the inside of a semiconductor carrier by including a cleaning device which is optimal for an inner shape of a semiconductor carrier. CONSTITUTION: A sealing chamber(110) includes an openable cover(114). A carrier receiving unit(120) is installed on the inner lower side of the sealing chamber. A rotating plate(130) is installed in the lower center of the sealing chamber. A DI high pressure spray unit(140) sprays deionized water of high pressure to a semiconductor carrier(12). A high pressure gas spray unit(150) sprays gas of high pressure to the semiconductor carrier.
|
